|United States Patent||6,797,336|
|Garvey , et al.||September 28, 2004|
The present invention is a method and apparatus for the synthesis of multi-component substances, comprising entities of at least two elements, molecules, grains, crystals, structural units, or phases of matter, in which the scale of the distribution of the elements, molecules, or phases of matter may range from on the order of nanometers or less, to about one millimeter, depending upon the specific materials and process conditions that are chosen. The method and apparatus of the present invention further provides processes for preparing these compositions of matter as thin films or particles.
|Inventors:||Garvey; James F. (Williamsville, NY), Tompa; Gary S. (Belle Mead, NJ), MacDonald; Stuart G. (Pultneyville, NY), DeLeon; Robert L. (Williamsville, NY)|
|Assignee:||AMBP Tech Corporation (Amherst, NY)
|Filed:||July 1, 2002|
|Application Number||Filing Date||Patent Number||Issue Date|
|Current U.S. Class:||427/561 ; 427/249.19; 427/255.28; 427/255.29; 427/562; 427/563; 427/564; 427/569; 427/576; 427/577; 427/578; 427/580; 427/586; 427/596; 427/597|
|Current International Class:||C23C 14/54 (20060101); C23C 14/32 (20060101); C23C 14/28 (20060101); C30B 25/00 (20060101); C01B 31/00 (20060101); C01B 31/02 (20060101); H01J 37/32 (20060101); C23C 014/28 ()|
|Field of Search:||427/561-564,569,576-578,580,586,596,597,249.19,255.28,255.29|
|5593740||January 1997||Strumban et al.|
|6090207||July 2000||Knauss et al.|
|6221330||April 2001||Moy et al.|
|6261424||July 2001||Goncharenko et al.|
|6277318||August 2001||Bower et al.|
|6600127||July 2003||Peterson et al.|
|2002/0066720||June 2002||Ha et al.|
|2003/0230554||December 2003||Schroder et al.|
|WO 92/13113||Aug., 1992||WO|
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Rexer et al., Review of Scientific Instruments, vol. 71, No. 5, May 2000, pp. 2125-2130.* .
Wijekoon; Lyktey; Prasad; Garvey, "Characterization of copper iodide thin films fabricated via laser-assisted molecular-beam deposition", J Appl. Phys. 74 (9), Nov. 1, 1993, c. 1993. p. 5267-5772. .
Wijekoon; Lyktey; Prasad; Garvey, The nature of copper thin films of coppper iodide grown y laser-assisted molecular beam deposition: comparative ESCA and EDXS studies, J. Phys. D: Appl. Phys. 27 (1994) IOP Publishing LTD; p. 1548-1555. .
Wijekoon; Prasad; Garvey; Fabrication of zinc oxide, titanium oxide and organic entrapped silica thin films via Laser Assisted Molecular Beam Deposition; c. 1995 SPIE vol. 2403 p. 143-152. .
Wijekoon; Lyktey; Prasad; Garvey, "Fabrication of a thin film of an inorganic organic composite via laser asisted molecular beam deposition"; Appl. Phys. Lett. 67 (12) Sep. 18, 1995; c. 1995 American Institute of Physics, p. 1698-1699 p. 1698 para. 2. .
Deleon; Sun; Rexer; Charlebois; Garvey; Forsythe; Tompa, Laser assisted molecular beam deposition of Si, C, and SiC films; Mat. Res. Soc. Symp. vol. 441 c.1997 Materials Research Society; p. 573-578 (exp Proc. Figs 1 and 2). .
Deleon; Prasad; Garvey, "Thin Film Formation by Laser-Assisted Molecula Beam Deposition"-Shalev, Ed.; Moskovits, Ed., "Nanostructured Materials; Clusters, Composites, and Thin Films," ACS Symposium Series 679, ACS (Washington, DC; US), (Apr. 25, 1997). .
Rexer; Joshi; Deleon; Prasad; Garvey, "A reactive laser ablation source for the production of thin films," Review of Scientific Intruments, 1998 American Institute of Physics; vol. 69, No. 8 pp. 3028-3030. Sec. II & III, Fig 1. .
Deleon; Joshi; Rexer; Prasad; Garvey; "Progress in thin film formation by assisted molecular beam deposition (LAMBD)";Applied Surface Science 127-129 (1998) 321-329 (2 experimental). .
Deleon; Joshi; Rexer; Prasad; Garvey; "Up-converted emission observed from hybrid inorganic:organic composite thin film generated via laser assisted molecular beam"; SPIE vol. 4106 (c. 2000) p. 289-299. .
Sugai; Omote; Bandow; Tanaka;Shinohara, "Production of fullerenes and single-wall carbon nanotubes by high-temperature pulsed arc discharge" Journal of Chemical Physics, vol. 112, 6000, 2000. .
Rexer; Wilbur; Mills; Deleon; Garvey, "Production of metal oxide thin fims by pulsed arc molecular," Review of Scientific Instruments, American Institute of Physics (US), vol. 71 (No. 2), p. 2125-2130, (Apr. 25, 2000). .
Cheung; Kurtz; Park; Lieber, "Diameter-Controlled Sythesis of Carbon Nanotubes," J. Phys. Chem. B, ACS (Washington, DC, US), p. 2429-2433, (Apr. 25, 2002)..