Overview
This technology provides an improvement to coating materials using a conical sputtering target. Sputter coatings on planar substrates can achieve a real thickness non-uniformity of less than +/- 0.2%.

Markets
Electronic components, data storage devices, telecommunications, DVD and CDs

IP Status
Patents:  

# 6,066,242 May 23, 2000;
# 6,235,170 May 22, 2001;
# 6,432,286 August 13, 2002.

Inventors
The inventors are available to assist in developing and furthering the technology.  

Contact
For more information and licensing arrangements please contact:
Michael Weiner
Technology Innovations, LLC
Phone: 239-603-6446

View Patent #01 - (html / pdf) for Conical Sputtering Target
View Patent #02 - (html / pdf) for Conical Sputtering Target
View Patent #03 - (html / pdf) for Conical Sputtering Target

View Slide Show - (PowerPoint) for Conical Sputtering Target